摘要
Transparentbrittlematerialssuchasglassandsapphirearewidelyconcernedandappliedinconsumerelectronics,optoelectronicdevices,etc.duetotheirexcellentphysicalandchemicalstabilityandgoodtransparency.Growingresearchattentionhasbeenpaidtodevelopingnovelmethodsforhigh-precisionandhigh-qualitymachiningoftransparentbrittlematerialsinthepastfewdecades.Amongthevarioustechniques,lasermachininghasbeenprovedtobeaneffectiveandflexiblewaytoprocessallkindsoftransparentbrittlematerials.Inthisreview,aseriesoflasermachiningmethods,e.g.laserfullcutting,laserscribing,laserstealthdicing,laserfilament,laserinducedbacksidedryetching(LIBDE),andlaserinducedbacksidewetetching(LIBWE)aresummarized.Additionally,applicationsofthesetechniquesinmicromachining,drillingandcutting,andpatterningareintroducedindetail.Currentchallengesandfutureprospectsinthisfieldarealsodiscussed.
出版日期
2019年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
