Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]-中国期刊网

摘要 Thereisarapidlygrowingdemandtousesiliconandsiliconnitride（Si3N4）integratedphotonicsforsensingapplications,rangingfromrefractiveindextospectroscopicsensing.BymakinguseofadvancedCMOStechnology,complexminiaturizedcircuitscanbeeasilyrealizedonalargescaleandatalowcostcoveringvisibletomid-IRwavelengths.InthispaperwepresentourrecentworkonthedevelopmentofsiliconandSi3N4-basedphotonicintegratedcircuitsforvariousspectroscopicsensingapplications.Wereportourfindingsonwaveguide-basedabsorption,andRamanandsurfaceenhancedRamanspectroscopy.Finallywereporton-chipspectrometersandon-chipbroadbandlightsourcescoveringverynear-IRtomid-IRwavelengthstorealizefullyintegratedspectroscopicsystemsonachip.

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Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

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Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

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