摘要
Tetrahedralamorphoushydrogenatedcarbon(ta-C:H)filmsonSi(lO0)substrateswerepreparedbyusingamagnetic-field-filterplasmastreamdepositionsystem.Sampleswithdifferentratiosofsp^3-bondtosp^2-bondwereobtainedbychangingthebiasvoltageappliedtothesubstrates.Theellipsometricspectraofvariouscarbonfilmsinthephotonenergyrangeof1.9-5.4eVweremeasured.Therefractiveindexnandtherelativesp^3CratioofthesefilmswereobtainedbysimulatingtheirellipsometricspectrausingtheForouhi-BloomermodelandbyusingtheBruggemaneffectivemediumapproximation,respectively.Thehaemocompatibilityoftheseta-C:Hfilmswasanalysedbyobservationofplateletadhesionandmeasurementofkineticclottingtime.Theresultsshowthatthesp^3Cfractionisdependentonthesubstratebiasvoltage,andthehaemocompatibilityisdependentontheratioofsp^3-bondtosp^2-bond.Agoodhaemocompatibilitymaterialofta-C:Hfilmswithasuitablesp^3Cfractioncanbepreparedbychangingthesubstratebiasvoltage.
出版日期
2004年11月21日（中国期刊网平台首次上网日期，不代表论文的发表时间）
