Formation of High-quality Advanced High-k Oxide Layers at Low Temperature by Excimer UV Lamp-assisted Photo-CVD and Sol-gel Processing-中国期刊网

摘要 Wehavesuccessfullydemonstratedthathighqualityandhighdielectricconstantlayerscanbefabricatedbylowtemperaturephoto-inducedor-assistedprocessing.Ta2O5andZrO2havebeendepositedatt＜400℃bymeansofaUVphoto-CVDtechniqueandHfO2byphoto-assistedsol-gelprocessingwiththeaidofexcimerlamps.TheUVannealingofas-grownlayerswasfoundtosignificantlyimprovetheirelectricalproperties.Lowleakagecurrentdensitiesontheorderof10-8A/cm2at1MV/cmfordepositedultrathinTa2O5filmsandca.10-6A/cm2forthephoto-CVDZrO2layersandphoto-irradiatedsol-gelHfO2layershavebeenreadilyachieved.TheimprovementintheleakagepropertiesoftheselayersisattributedtotheUV-generatedactiveoxygenspeciesO(1D)whichstronglyoxidizeanysuboxidestoformmorestoichiometricoxidesonremovingcertaindefects,oxygenvacanciesandimpuritiespresentintheas-preparedlayers.Thephoto-CVDTa2O5filmsdepositedacross10.16-cmSiwafersexhibitahighthicknessuniformitywithavariationoflessthan±2.0%beingobtainedforultrathinca.10nmthickfilms.Thelamptechnologycaninprinciplebeextendedtolargerareawafers,providingapromisinglowtemperatureroutetothefabricationofarangeofhighqualitythinfilmsforfutureULSItechnology.

1MAYue ZHOUDe-feng ZHANGJing-ping HAOJie XIEHai-ming ZHANGXi-yan SUZhong-min WANGRong-shun. Electrochemical Performance Studies of Tin Oxide Prepared by Sol-Gel.化学,2004-05.
2杨东;陆景彬;刘运祚;马克岩;王辉东;王烈林;刘弓冶;李黎;马英君;竺礼华;吴晓光;李广生;贺创业. High-k Structures in 124Cs.核技术及应用,2012-07.
3Kornkamol Banjerdteerakul;Paravee Vas-Umnuay;Varong Pavarajarn. Synthesis of mesoporous tin dioxide via sol-gel process assisted by resorcinol-formaldehyde gel.力学,2018-02.
4ZhangTianhao. Problems and countermeasures of enabling high-quality development of fintech.建筑技术科学,2024-04.
5孙钦星;张涛;王先平;方前锋;胡菁;刘长松. Synthesis and Characterization of Oxide Dispersion Strengthened Ferritic Steel via a Sol-Gel Route.核技术及应用,2012-07.
6Yoon Shik Han. Audit Quality in Kazakhstan： Does Big 4 Provide High-Quality Audits？.会计学,2012-12.
7Feng Zhongping. How to Help Think Tanks Produce High-quality Research.国际关系,2016-03.
8Beibei Zhao;Yan Zhang;Tao Tang;Fengyun Wang;Tong Li;Qiyu Lu. Preparation of high-purity monodisperse silica microspheres by the sol-gel method coupled with polymerization-induced colloid aggregation.力学,2015-05.
9Uwe KLIPPEL;Jerome SOUDIER;Johnson LEE;Asep WAHYU. Colloidal Silica Sol Bonded Castables for High Temperature Applications.硅酸盐工业,2015-01.
10Taohua HUANG;Shengming ZHOU;Hao TENG;Hui LIN;Jun ZOU;Jianhua ZHOU;Jun WANG. Growth and Characterization of High-quality LiAlO2 Single Crystal.材料科学与工程,2008-02.

Formation of High-quality Advanced High-k Oxide Layers at Low Temperature by Excimer UV Lamp-assisted Photo-CVD and Sol-gel Processing

来源期刊

相关推荐

同分类资源更多

相关关键词

Formation of High-quality Advanced High-k Oxide Layers at Low Temperature by Excimer UV Lamp-assisted Photo-CVD and Sol-gel Processing

来源期刊

相关推荐

同分类资源 更多

相关关键词

同分类资源更多