摘要
Thecombinedquadraticorthogonalregressionmethodofexperimentdesignwasemployedtoexploretheeffectsofprocessparametersofplasmanitridingoftantalumsuchastotalpressure,temperatureandoriginalhydrogenmolarfractiononthehardness,roughnessandstructureofnitridingsurfaces.Theregressionequationsofhardness,roughnessandstructureweregivenaccordingtotheresultsofregressionandstatisticanalysis.Andthediffusionactivationenergyofnitrogenintantalumonplasmanitridingconditionswascalculatedaccordingtotheexperimentaldataofhardnessofplasma-nitridingoftantalumvstimeandtemperature.Thediffusionactivationenergycalculatedbelongsto(155.49+10.51)kJ/mol(783-983K).
出版日期
2004年02月12日（中国期刊网平台首次上网日期，不代表论文的发表时间）
