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Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate

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摘要 TheeffectofseedlayerontheorientationofZnOfilmwasinvestigated.BeforethepreparationofZnOfilmusingsol-gelmethod,seedlayerofZnOwaspreparedinasimilarwayusingtheprecursorataratherlowconcentration.ExperimentsshowthattheexistenceofseedlayercanimprovetheorientationofthefinallypreparedZnOfilm,whilebakingtemperature,bakingtimeandprecursorconcentrationallhaveeffectsonthefinalresults.

DOI n49e5v19dy/392511

作者 Mi XIAO;Makoto KUWABARA

机构地区不详

出处《材料科学技术学报：英文版》 2005年6期

关键词氧化锌薄膜溶胶凝冻体光致发光物理性质

分类 [一般工业技术][材料科学与工程]

出版日期 2005年06月16日（中国期刊网平台首次上网日期，不代表论文的发表时间）

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材料科学技术学报：英文版

材料科学技术学报：英文版

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氧化锌薄膜溶胶凝冻体光致发光物理性质

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