摘要
Themechanismofanon-polarizingbeamsplitter(NPBS)withasymmetricaltransfercoefficientscausingtherotationofpolarizationdirectionisexplainedinprinciple,andthemeasurementnonlinearerrorcausedbyNPBSisanalyzedbasedonJonesmatrixtheory.Theoreticalcalculationsshowthatthenonlinearerrorchangesperiodically,andtheerrorperiodandpeakvaluesincreasewiththedeviationbetweentransmissivitiesofp-polarizationands-polarizationstates.Whenthetransmissivityofp-polarizationis53%andthatofs-polarizationis48%,themaximumerrorreaches2.7nm.TheimperfectionofNPBSisoneofthemainerrorsourcesinsimultaneousphase-shiftingpolarizationinterferometer,anditsinfluencecannotbeneglectedinthenanoscaleultra-precisionmeasurement.
出版日期
2010年05月15日（中国期刊网平台首次上网日期，不代表论文的发表时间）
