简介：Silicondioxide(SiO2)filmswerepreparedonsapphire(α-Al2O3)byradiofrequencymagnetronreactivesputteringinordertoincreasebothtransmissionandrainerosionresistantperformanceofinfrareddomesofsapphire.CompositionandstructureofSiO2filmswereanalyzedbyX-rayphotoelectronspectroscopy(XPS)andX-raydiffraction(XRD),respectively.ThetransmittanceofuncoatedandcoatedsapphirewasmeasuredusingaFouriertransforminfrared(FTIR)spectrometer.Rainerosiontestsoftheuncoatedandcoatedsapphirewereperformedat211m/simpactvelocitywithanexposuretimerangingfrom1to8minonawhirlingarmrig.Resultsshowthatthedepositedfilmscangreatlyincreasethetransmissionofsapphireinmid-waveIR.Afterrainerosiontest,decreasesinnormalizedtransmissionwerelessthan1%fordesignedSiO2filmsandtheSiO2coatingwasstronglybondedtothesapphiresubstrate.Inaddition,sapphirescoatedwithSiO2filmshadahighertransmittancethanuncoatedonesafterrainerosion.