简介：Thelocalthermalconductivityofpolycrystallinealuminumnitride(AlN)ceramicsismeasuredandimagedbyusingascanningthermalmicroscope(SThM)andcomplementaryscanningelectronmicroscope(SEM)basedtechniquesatroomtemperature.ThequantitativethermalconductivityfortheAlNsampleisgainedbyusingaSThMwithaspatialresolutionofsub-micrometerscalethroughusingthe3ωmethod.Athermalconductivityof308W/m·Kwithingrainscorrespondingtothatofhigh-puritysinglecrystalAlNisobtained.Theslightdifferencesinthermalconductionbetweentheadjacentgrainsarefoundtoresultfromcrystallographicmisorientations,asdemonstratedintheelectronbackscattereddiffraction.Amuchlowerthermalconductivityatthegrainboundaryisduetoimpuritiesanddefectsenrichedinthesesites,asindicatedbyenergydispersiveX-rayspectroscopy.