简介:X-rayThomsonscatteringtechniquefordiagnosingdenseplasmawasdemonstratedonShenguang-Πlaserfacility.Laserplasmax-raysourceoftitaniumHe-αlines(~4.75keV),generatedbylaserbeam(1.5kJ/527nm/2ns)heatedtitaniumthinfoil,wasusedasx-rayprobebeam.Thex-rayprobewasthenscatteredbycoldCHfoamcolumnof1g/cm3density.Thescatteredradiationat90wasdiffractedbypolyethyleneterephthalate(PET)crystalandrecordedonx-raycharge-coupleddevice.Well-definedscatteringspectrawereobtainedwithgoodsignaltonoiseratio.
简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.
简介:Athreedimensionalsteady-statemagnetohydrodynamicmodelisdevelopedforthearcplasmainaDCsubmergedelectricarcfurnacefortheproductionoffusedMgO.Thearcisgeneratedinasmallsemi-enclosedspaceformedbythegraphiteelectrode,themoltenbathandunmeltedrawmaterials.Themodelisfirstusedtosolveasimilarprobleminasteelmakingfurnace,andthecalculatedresultsarefoundtobeingoodagreementwiththepublishedmeasurements.ThebehaviorofarcswithdifferentarclengthsisalsostudiedinthefurnaceforMgOproduction.Fromthedistributionofthearcpressureonthebathsurfaceitisshownthatthearcplasmaimpingementislargeenoughtocauseacrater-likedepressiononthesurfaceoftheMgObath.Thecirculationofthehightemperatureairundertheelectrodemayenhancethearcefficiency,especiallyforashorterarc.
简介:Thisworkinvestigatesinternalplasmaprocessparametersusingahairpinresonanceprobeandopticalemissionspectroscopy.ThedependenceofelectrondensityandatomicfluorineonthepercentageofoxygeninanSF6/O2dischargewasmeasuredusingthesemethods.AnRIEOxfordInstruments80pluschamberwasusedfortheexperiments.Twodifferentprocesspowers(100Wand300W)ataconstantpressure(100mTorr)wereused,anditwasfoundthattheopticalemissionintensityofthe703.7nmand685.6nmlinesofatomicfluorineincreasedrapidlyasoxygenwasaddedtotheSF6discharge,reachedtheirmaximumatanO2fractionof20%andthendecreasedwithfurtheradditionofoxygen.TheplasmaelectrondensitywasalsostronglyinfluencedbytheadditionofO2.
简介:WehavedevelopedaplasmaetchingsimulatortoinvestigatetheevolutionofpatternprofilesinSiO2materialunderdifferentplasmaconditions.Thismodelfocusesonenergyandangulardependentetchingyield(physicalsputteringinthispaper),neutralandionangulardistributions,andreflectionofionsorneutralsonthesurfaceofaphotoresistorSiO2.TheeffectofpositivechargeaccumulationonthesurfaceofinsulatedmaskorSiO2isstudiedandthechargeaccumulationcontributestoadeflectionofiontrajectory.Thewaferprofileevolutionhasbeensimulatedusingacellular-automata-likemethodunderradio-frequency(RF)biasanddirect-current(DC)bias,respectively.Onthebasisofthecriticalroleofangulardistributionofionsorneutrals,thewaferprofileevolutionhasbeensimulatedfordifferentvariancesofangles.Observedmicrotrenchinghasbeenwellreproducedinthesimulator.Theratioofneutralstoionshasbeenconsideredandtheresultshowsthatbecausetheneutralsarenotacceleratedbyanelectricfield,theirenergyismuchlowercomparedwithions,sotheyareeasilyreflectedonthesurfaceofSiO2,whichmakesthetrenchshallower.
简介:Themicroscopiceffectivechargesinmirrornuclei51Mnand51Feareinvestigatedwiththeparticle-vibrationcouplingmodelbasedontheself-consistentSkyrme-Hartree-Fockandcontinuumrandom-phase-approximationapproaches.Theisovectorpartsarepredictedtobearound0.15,andtheprotoneffectivechargesarearound1.25e,whichislessthantheempiricalvalueofeeffp=1.5e.Themicroscopiceffectivechargesinneutronrich51Mnareabout10%lessthanitsprotonrichmirror.TheseeffectivechargesarecombinedwiththeshellmodeltocalculatethereducedelectricquadrupoletransitionprobabilityB(E2)valuesin51Mnand51Fe.ItturnsoutthatthemicroscopiceffectivechargeshavewellreproducedtheB(E2)valuesanditsratiointheterminatingstates.