摘要
Inatmosphericradio-frequency(rf)discharges,theplasmaparameters,suchaselectrondensity,sheaththicknessandsheathvoltage,arenoteasytobeprobedexperimentally,whiletheelectricalcharacteristics,suchasimpedance,resistanceandreactance,arerelativelyconvenienttobemeasured.Inthispaperwepresentedasimpletheoreticalmodelderivedfromthefluiddescriptionofgeneratedplasmaswithoutconsideringthecircuitmodel,toinvestigatetherelationshipbetweentheplasmaimpedanceandplasmaparameters.Byintroducingarelaxationfrequency,theplasmaimpedancecouldbepredictedbyformulaspresentedinthisstudy,andthemeanelectrondensityandsheaththicknesscanalsobecalculatedfromthemeasuredorsimulatedimpedanceandreactance,respectively.
出版日期
2014年10月20日（中国期刊网平台首次上网日期，不代表论文的发表时间）
