摘要
Aone-dimensional(1D)fluidsimulationofdualfrequencydischargeinheliumgasatatmosphericpressureiscarriedouttoinvestigatetheroleofthesecondaryelectronemissiononthesurfacesoftheelectrodes.Inthesimulation,electrons,ionsofHe+andHe2+,metastableatomsofHe*andmetastablemoleculesofHe*2areincluded.Itisfoundthatthesecondaryelectronemissioncoefficientsignificantlyinfluencesplasmadensityandelectricfieldaswellaselectronheatingmechanismsandionizationrate.TheparticledensitiesincreasewithincreasingSEEcoefficientfrom0to0.3aswellasthesheath’selectricfieldandelectronsource.Moreover,theSEEcoefficientalsoinfluencestheelectronheatingmechanismandelectronpowerdissipationintheplasmaandbothofthemincreasewithincreasingSEEcoefficientwithintherangefrom0to0.3asaresultofincreasingofelectrondensity.
出版日期
2019年02月12日（中国期刊网平台首次上网日期，不代表论文的发表时间）
