Experimental Characterization of Dual-Frequency Capacitively Coupled Plasma with Inductive Enhancement in Argon-中国期刊网

摘要 Thedual-frequencycapacitivelycoupledplasma(DF-CCP)withinductiveenhancementsystemisanewlydesignedplasmareactor.Differentfromtheconventionalinductivelycoupledplasma(ICP)reactors,nowaradiofrequency(rf)powerisconnectedtoanantennaplacedoutsidethechamberwithaone-turnbarecoilplacedbetweentwoelectrodesinDF-CCP.Thispapergivesadetaileddescriptionofitsstructure.Moreover,investigationsonsomecharacteristicsofdischargesinthisapparatusweremadeviaaLangmuirprobe.

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Experimental Characterization of Dual-Frequency Capacitively Coupled Plasma with Inductive Enhancement in Argon

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Experimental Characterization of Dual-Frequency Capacitively Coupled Plasma with Inductive Enhancement in Argon

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