PEO-Like Functional Films＇ Polymerization in RF-PECVD-中国期刊网

摘要 Polymerethyleneoxide(PEO)functionalfilmscanbeusedasamaterialforbiocompatibleresearch.Inthispaper,weinvestigatedthestructuresofPEO-likefilmspolymerizedonSisurfacewithdiethlyeneglycoledimethylether(DEGDME)astheprecursorandArasthedilutiongasbyplasmaenhancedchemicalvapordeposition(PECVD).Andthepulseplasmamodelwasemployedtopolymerizethefunctionalfilms.ThechemicalstructureofthecoatingswasinvestigatedbyFouriertransforminference(FTIR)andX-rayphotoelectronspectroscopy(XPS).TheresultsindicatethatPEO-likestructurefilmscanbepolymerizedbyDEGDME/Arplasma.TheconcentrationofC-Ofunctionalgroupspolymerizedinthelohgplasma-offtimewasmuchhigherthanthatintheshortplasma-offtime.Withthesamedischargeparameters,moreover,theC-Oratioinpolymersincreasedwithahigherinjectedpower.

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PEO-Like Functional Films＇ Polymerization in RF-PECVD

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PEO-Like Functional Films＇ Polymerization in RF-PECVD

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