Polymerethyleneoxide(PEO)functionalfilmscanbeusedasamaterialforbiocompatibleresearch.Inthispaper,weinvestigatedthestructuresofPEO-likefilmspolymerizedonSisurfacewithdiethlyeneglycoledimethylether(DEGDME)astheprecursorandArasthedilutiongasbyplasmaenhancedchemicalvapordeposition(PECVD).Andthepulseplasmamodelwasemployedtopolymerizethefunctionalfilms.ThechemicalstructureofthecoatingswasinvestigatedbyFouriertransforminference(FTIR)andX-rayphotoelectronspectroscopy(XPS).TheresultsindicatethatPEO-likestructurefilmscanbepolymerizedbyDEGDME/Arplasma.TheconcentrationofC-Ofunctionalgroupspolymerizedinthelohgplasma-offtimewasmuchhigherthanthatintheshortplasma-offtime.Withthesamedischargeparameters,moreover,theC-Oratioinpolymersincreasedwithahigherinjectedpower.
