摘要
Theetchingeffectofammonia(NH3)onthegrowthofverticallyalignednanotubes/nanofibers(CNTs)wasinvestigatedbydirect-currentplasmaenhancedchemicalvapordeposition(DC-PECVD).NH3gasetchesNicatalystlayertoformnanoscaleislandswhileNH3plasmaetchesthedepositedamorphouscarbon.BasedontheetchingeffectofNH3gasonNicatalyst,thedifferencesofgrowingbundlesofCNTsandsinglestrandCNTswerediscussed;specifically,theamountofoptimalNH3gasetchingisdifferentbetweenbundlesofCNTsandsinglestrandCNTs.IncontrasttotheCNTcarpetgrowth,thesinglestrandCNTgrowthrequiresshorteretchingtime(5min)thanlargecatalyticpatterns(10min)sincenanodotsalreadyformcatalystislandsforCNTgrowth.Throughremovingtheplasmapretreatmentprocess,thedamagefrombeingexposedathightemperaturesubstrateoccurringduringtheplasmagenerationtimeisminimized.Highresolutiontransmissionelectronmicroscopy(HTEM)showsfishbonestructureofCNTsgrownbyPECVD.
出版日期
2011年09月19日(中国期刊网平台首次上网日期,不代表论文的发表时间)