Effect of ammonia gas etching on growth of vertically aligned carbon nanotubes/nanofibers

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摘要 Theetchingeffectofammonia(NH3)onthegrowthofverticallyalignednanotubes/nanofibers(CNTs)wasinvestigatedbydirect-currentplasmaenhancedchemicalvapordeposition(DC-PECVD).NH3gasetchesNicatalystlayertoformnanoscaleislandswhileNH3plasmaetchesthedepositedamorphouscarbon.BasedontheetchingeffectofNH3gasonNicatalyst,thedifferencesofgrowingbundlesofCNTsandsinglestrandCNTswerediscussed;specifically,theamountofoptimalNH3gasetchingisdifferentbetweenbundlesofCNTsandsinglestrandCNTs.IncontrasttotheCNTcarpetgrowth,thesinglestrandCNTgrowthrequiresshorteretchingtime(5min)thanlargecatalyticpatterns(10min)sincenanodotsalreadyformcatalystislandsforCNTgrowth.Throughremovingtheplasmapretreatmentprocess,thedamagefrombeingexposedathightemperaturesubstrateoccurringduringtheplasmagenerationtimeisminimized.Highresolutiontransmissionelectronmicroscopy(HTEM)showsfishbonestructureofCNTsgrownbyPECVD.
机构地区 不详
出版日期 2011年09月19日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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