A One-Dimensional Hybrid Simulation of DC/RF Combined Driven Capacitive Plasma

(整期优先)网络出版时间:2012-01-11
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Wedevelopedaone-dimensionalhybridmodeltosimulatetheDC/RFcombineddrivencapacitivelycoupledplasmaforargondischarges.ThenumericalresultsareusedtoanalyzetheinfluenceoftheDCsourceontheplasmadensitydistribution,ionenergydistributions(IEDs)andionangledistributions(IADs)onboththeRFandDCelectrodes.TheincreaseinDCvoltagedrivesmorehigh-energyionstotheelectrodeappliedtotheDCsource,whichmakestheIEDsattheDCelectrodeshifttowardshigherenergy,andthepeaksintheIADsshifttowardssmallangleregions.Atthesametime,italsodecreasestheionenergyattheRFelectrodeandenlargestheincidentanglesoftheions,whichstriketheRFelectrode.