On the Characteristics of Coaxial-Type Microwave Excited Linear Plasma: a Simple Numerical Analysis

(整期优先)网络出版时间:2015-05-15
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Tounveilthecharacteristicsandavailablepropagationmechanismofcoaxial-typemicrowaveexcitedline-shapeplasma,theeffectsofparametersincludingmicrowavepower,workingpressure,dielectricconstant,andexternalmagneticfieldontheplasmadistributionwerenumericallyinvestigatedbysolvingacoupledsystemofMaxwell’sequationsandcontinuityequations.Numericalresultsindicatethathighmicrowavepower,relativelyhighworkingpressure,lowdielectricconstant,andshapedmagneticfieldprofileswillhelpproduceahigh-densityanduniformplasmasource.Excitingbothendsbymicrowavecontributedtothehigh-densityanduniformplasmasourceaswell.Possiblemechanismswereanalyzedbyusingthepolarizationmodeloflowtemperatureplasma.Thegenerationandpropagationprocessesoftheline-shapeplasmamainlydependontheinteractionofthreeaspects,i.e.thetransmittedpart,penetrationpartandabsorptivepartoftheelectromagneticfield.Thenumericalresultswerequalitativelyconsistentwithavailableexperimentalresultsfromliterature.Moreelaboratedescriptionsofthethreeaspectsandcorrespondinginteractionsamongthemneedtobeinvestigatedfurthertoimprovethepropertiesoftheline-shapeplasma.