ON THE INTERACTION BETWEEN A QUARTZ CRYSTAL RESONATOR AND AN ARRAY OF MICRO-BEAMS IN THICKNESS-SHEAR VIBRATIONS

(整期优先)网络出版时间:2015-05-15
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Westudiedthecoupleddynamicbehaviorofaquartz-crystal-resonator(QCR)/microbeamssysteminthethickness-shearmotions.Throughtakingintoaccountthecouplestressinthedynamicequationsofthequartzplate,bothcontinuousconditionsofshearforceandbendingmomentattheresonator/micro-beamsinterfacearerealized.FrequencyshiftofthecompoundQCRsysteminducedbymicro-beamsisstudiedindetail.Theobtainedresultsareusefulindevicedesignandfrequency-stabilityanalysisofquartzcrystalresonators.