AlNthinfilmsirradiatedwith100MeVU,95MeVArand84MeVCionsfromtheHIRFL-SFC(HeavyIonResearchFacilityinLanzhou)wereinvestigatedbyInfraredspectraandRamanspectra.ItappearedA1（TO),A1（LO),E1（To）andE2PhononvibrationabsorptionmodetoirradiatedsamplesinFig.1.652cm??1isvibrationabsorptionpeakofAlN，withtheincreaseofirradiationdose,thevibrationabsorptionbandappearacertainbroadeningphenomena.Lightercarbonionirradiationonthevibrationabsorptionbandbroadeningoftheimpactisnotbig.670cm??1isthetransverseopticalphononabsorptionpeakoftheE1(TO),afterirradiation,thevibrationabsorptionpeakandthebroadenAl-Nkeyintoanorganicwhole.249and660cm??1istheE2(low)andE2(high)
