Highenergyprotonbeamhasthelongpenetrationlengthinsolidmatteranditcouldproducetheradiographsandindicatethetomographyandmaterialpropertiesinsideofthespecimen.Consideringtheexpensivecoststoconstructahighenergyprotonaccelerator,theothercandidateofhighenergyelectronbeambecomesmoreacceptable[1??3].Duetothehighspatialandtemperalresolutionofhighenergyelectronbeam.Itisapowertooltodiagnosetheinnerstructurechangeduringthehighenergydensitymatterproductionandtheinertialconfinementfusionprocess.Inordertostudythedensityresolutionofthehighenergyelectronbeamradiography,astep-targetwasdesignedandproduced.ThestructureandthetargetpicturesareshowninFig.1andtheSitargetswithdifferentslot-widthwereproducedbyusingthemicroetchtechnics.
