Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis

(整期优先)网络出版时间:2019-01-11
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Wereportamethodforsimultaneouslyanddirectlymeasuringallsix-degrees-of-freedom(six-DOF)motionerrorsofarotaryaxis.Suchamethodcombinestheprinciplesoflaserinterferometryandlasercollimationmeasurement.Onereferencerotaryaxisandtworetro-reflectorsareusedtoachievesimultaneoussensitivitytoallsixerrorsinafull-circlemeasuringrange.Asnoseparationmodelsarerequired,ourmethodiscapableofdynamicallymeasuringtheseerrorsinrealtimeandconvenientlydeterminingtheoriginoftheerrors.Anautomaticmeasuringdeviceisbuilt.Theeffectivenessofourmethodisexperimentallydemonstrated.