Accurate extraction of fabricated geometry using optical measurement

(整期优先)网络出版时间:2018-11-21
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Weexperimentallydemonstrateextractionofsiliconwaveguidegeometrywithsubnanometeraccuracyusingopticalmeasurements.Effectiveandgroupindicesofsilicon-on-insulator(SOI)waveguidesareextractedfromtheopticalmeasurements.AnaccuratemodellinkingthegeometryofanSOIwaveguidetoitseffectiveandgroupindicesisusedtoextractthelinewidthsandthicknesseswithinrespectiveerrorsof0.37and0.26nmonadiefabricatedbyIMECmultiprojectwaferservices.Adetailedanalysisofthesettingoftheboundsfortheeffectiveandgroupindicesispresentedtogettherightextractionwithimprovedaccuracy.