Wehaveshownthat,incontrasttotheresultsintheliterature,theBraggpeakintensityofNi80Fe20/Cusuperlatticesisenhancedattheincidentx-rayenergyslightlyhigherthantheabsorptionedgeoftheheavierelement(Cu).TheatomicdensityatNi80Fe20/Cuinterfacewasanalysedbythediffractionanomalousfinestructuretechnologywiththeincidentangleofx-rayfixedatthefirstBraggpeak.OurresultsdemonstratetheepitaxygrowthofNi80Fe20/Cusuperlattices.Uponannealing,theepitaxityofNi80Fe20/Cumultilayersbecomespoorbutthelocalcrystallinityineachlayerisimproved.