Thereisatradeoffbetweenthequantumefficiencyandthespectralresponselinewidthinresonant-cavityenhanced(RCE)photodetectors.Recentlyanewtypeofphotodetectorstructurehasbeenproposed,whichutilizesaninclinedmirrorinathree-mirrorcavity.Itdecouplesthequantumefficiencyandthespectralresponselinewidthandhashighresponsespeed,highquantumefficiency,andnarrowlinewidthsimultaneously.Theanalysisresultindicatesthatthelinewidthof0.8nmandquantumefficiencyhigherthan70%canbeachievedonthisdevice.Fora30×30μm2device,themaximumbandwidthapproaches23GHz.
