Inthisstudy,SiO_xfilmsweredepositedbyadielectricbarrierdischarge(DBD)plasmagunatanatmosphericpressure.TherelationshipofthefilmstructureswithplasmapowerswasinvestigatedbyFouriertransforminfraredspectroscopy(FTIR),andscanningelectronmicroscope(SEM).Itwasshownthatanuniformandcross-linkingstructurefilmwasformedbytheDBDgun.Asanapplication,theSiO_xfilmsweredepositedonacarbonsteelsurfacefortheanti-corrosionpurpose.Theexperimentwascarriedoutina0.1MNaC1solution.Itwasfoundthataverygoodanti-corrosivepropertywasobtained,i.e.,thecorrosionratewasdecreasedc.a.15timesin5%NaClsolutioncomparedtothenon-SiO_xcoatedsteel,asdetectedbythepotentiodynamicpolarizationmeasurement.
