简介：Severalmethodsforinvestigatingthethicknessuniformityofpolymerthinfilmsarepresentedaswellastheirmeasurementprinciples.Acomparisonoftheseexperimentalmethodsisgiven.Thecylindricallightwavereflectionmethodisfoundtocanobtainthethicknessdistributionalongacertaindirection.Itisasimpleandsuitablemethodtoevaluatethefilmthicknessuniformity.
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