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1 个结果
  • 简介:Tounveilthecharacteristicsandavailablepropagationmechanismofcoaxial-typemicrowaveexcitedline-shapeplasma,theeffectsofparametersincludingmicrowavepower,workingpressure,dielectricconstant,andexternalmagneticfieldontheplasmadistributionwerenumericallyinvestigatedbysolvingacoupledsystemofMaxwell’sequationsandcontinuityequations.Numericalresultsindicatethathighmicrowavepower,relativelyhighworkingpressure,lowdielectricconstant,andshapedmagneticfieldprofileswillhelpproduceahigh-densityanduniformplasmasource.Excitingbothendsbymicrowavecontributedtothehigh-densityanduniformplasmasourceaswell.Possiblemechanismswereanalyzedbyusingthepolarizationmodeloflowtemperatureplasma.Thegenerationandpropagationprocessesoftheline-shapeplasmamainlydependontheinteractionofthreeaspects,i.e.thetransmittedpart,penetrationpartandabsorptivepartoftheelectromagneticfield.Thenumericalresultswerequalitativelyconsistentwithavailableexperimentalresultsfromliterature.Moreelaboratedescriptionsofthethreeaspectsandcorrespondinginteractionsamongthemneedtobeinvestigatedfurthertoimprovethepropertiesoftheline-shapeplasma.

  • 标签: 等离子体源 微波激励 同轴型 数值分析 低介电常数 特性