简介:Anewcatalyticchemicalvaporprocessfordepositingsiliconnitridefilmsusingsilanehydrazinegaseousmixtureisdescribed.Thissystemcanbeusefulatatemperatureoflowerthan400℃.Thecatalyticprocessgivesmorerapiddepositionratethan10nm/min.Theatomiccompositionration.N/Si,whichisevaluatedbyRutherfoldbackatteringmethodisabout1.4underagivenexperimentalconditionsmorethanthestoiciometricvalueof1.33inSi3N4.Theinfraredtransmissionspectrashowalargedipat850cm^-1duetoSi-NbondsandnocleardipduetoSi-Obonds.HighN-HbonddensityistheevidencethatthedepositionmechanismislimitedbyN-Nbondbreakingofthehydrazine.TheHcontents,evaluatedfromSi-HandN-Hbondsintheinfraredabsorptionspectra,andthedepositionratearemeasuredasafunctionofthesubstratetemperature.Inadditionsomefilmpropertiessuchasthereistivityandthebreakdownelectricfieldarepresented.
简介:ThediamondfilmshavebeendepositedbythehotfilamentCVDmethodonmolybdenumsubstratesfromthemixturereactantgasofacetoneandhy-drogen.Thesurfacemorphologiesoftheobtaineddiamondfilmsundervariousde-positionconditionshavebeenobservedbyscanningelectronmicroscope(SEM).Theexperimentalresultsstronglyindicatethatthesurfacemorphologiesofthere-sultingfilmshavecloselyrelatedtothedepositionconditions,i.e.,reactionpres-sure.Formolybdenumsubstrates,underthelowerreactionpressurethesurfacemorphologiesofthegrainscomprisingtheresultingfilmsmainlydisplaythesmallsinglecrystalcubo-octahedronanddoublesmallcrystalcubo-octahedron;underthehigherreactionpressure,thesurfacemorphologiesmainlydisplaythelargecauliflower-like.TheseresultsshowthattherearevariouscrystalhabitsforCVDdiamondundervariousdepositionconditions.
简介:Amorphoussiliconfilmsarepreparedatlowertemperatureof350℃bynewcatalyticchemicalvapordepositionmethod.Inthemethod,materialgases(SiH4andH2)aredecomposedbycatalyticreactionatgiventemperature,soa-Sifilmsaredepositedonsubstrates.Itisfoundthata-Sifilmswithhighqualitycanbeobtain,suchashighphotosensitivityof10^6,lowspindensityof2.5×10^16cm^-3.
简介:有h<100>的铝氮化物(AlN)电影水晶的取向在希腊语的第二十三个字母(100)上被制作在由搏动的激光免职的房间温度的底层。激光精力密度的效果并且在这些电影的质量上退火被X光衍射学习,Fourier变换红外线的光谱学和扫描电子显微镜学。当有表面上的混杂粒子的增加的数字时,AlN电影的水晶的质量被增加激光精力密度更加改进。在600掳C的退火的处理在这部电影生产一个再结晶过程,由原来的crystallinity,新水晶的取向的外观,和雏晶的增加的改进描绘了。表面在退火期间由于谷物尺寸的增加变得更不平。CLC数字O484.1在资助下面由山东省的自然科学基础支持了没有Y2002A04
简介:Monodispersed硅石有353nm的直径的微范围是在乙醇的装配intophotonic水晶在借助于可控制的垂直免职方法的不同温度和湿度的改变的硅石体积部分的胶体的暂停。表面形态学和光性质被SEM和UV-Vis-NIR学习。这被发现high-qualitysilica胶体的photonic晶体与在45℃和55℃之间的环境温度从乙醇答案被获得,在66%和76%之间的湿度,微范围的体积部分是between0.8%并且1.5%。可控制的垂直免职方法制作的订的拥挤不堪的photonic水晶在可见轻乐队和近红外线的乐队有二photonic乐队差距。
简介:UsingCu-phthalocyanine(CuPc),4,4'-diaminodiphenyletherandpyromelliticdianhydrideasmonomermaterials,polyimide(PI)thinfilmsdoped-CuPchavebeenpreparedontoglasssubstratebyvaporphaseco-depositionpolymerizationunderavacuumof2×10-3Paandthermalcuringofpolyamicacidfilminattemperatureof150-200Cfor60min.Inthisprocess,thepolymerizationcanbecarriedoutthroughcontrollingthestoichiometricratio,heatingtimeanddepositionratesofthethreemonomers.IRspectrumidentifiesthedesignedchemicalstructureofthepolymer.Theabsorptionofpolyimidedoped-CuPcisveryintenseinvis-rangeandnear-infraredbyUV-Visspectrum.And,thePIfilmsdoped-CuPcpolymerizedbyvaporphasedepositionhaveuniformity,finethermalstabilityandgoodnonlinearopticalproperties,andthethird-orderopticalnonlinearsusceptibilityx(2)withdegeneratefour-wavemixingcanbe1.984×10-9ESU.
简介:WefabricatepolycrystallineCu(In,Ga)Se2(CIGS)filmsolarcellsonpolyimide(PI)substrateattemperatureof450°Cwithsingle-stageprocess,andobtainapoorcrystallizationofCIGSfilmswithseveralsecondaryphasesinit.Forimprovingitfurther,thetwo-stageprocessisadoptedinsteadofthesingle-stageone.AnextraCu-richCIGSlayerwiththethicknessfrom100nmto200nmisgrownonthesubstrate,andthenanotherCu-poorCIGSfilmwiththicknessof1.5-2.0μmisdepositedonit.Withthemodificationoftheevaporationprocess,thegrainsizeofabsorberlayerisincreased,andtheadditionalsecondaryphasesalmostdisappear.Accordingly,theoveralldeviceperformanceisimproved,andtheconversionefficiencyisenhancedbyabout20%.