摘要
Inthiswork,incompressibleandcompressibleflowsofbackgroundgasarecharacterizedinargoninductivelycoupledplasmabyusingafluidmodel,andtherespectiveinfluenceofthetwoflowsontheplasmapropertiesisspecified.Intheincompressibleflow,onlythevelocityvariableiscalculated,whileinthecompressibleflow,boththevelocityanddensityvariablesarecalculated.Thecompressibleflowismorerealistic;nevertheless,acomparisonofthetwotypesofflowisconvenientforpeopletoinvestigatetherespectiveroleofvelocityanddensityvariables.Theperipheralsymmetricprofileofmetastabledensitynearthechambersidewallisbrokenintheincompressibleflow.Atthecompressibleflow,theelectrondensityincreasesandtheelectrontemperaturedecreases.Meanwhile,themetastabledensitypeakshiftstothedielectricwindowfromthedischargecenter,besidesfortheperipheraldensityprofiledistortion,similartotheincompressibleflow.Thevelocityprofileatincompressibleflowisnotalteredwhenchangingtheinletvelocity,whereasclearpeakshiftofvelocityprofilefromtheinlettotheoutletatcompressibleflowisobservedasincreasingthegasflowrate.Theshiftofvelocitypeakismoreobviousatlowpressuresforitiseasytocompresstherarefiedgas.Thevelocityprofilevariationsatcompressibleflowshowpeopletheconcreteresidingprocessesofbackgroundmoleculeandplasmaspeciesinthechamberatdifferentflowrates.Ofmoresignificanceisitimpliedthatintheusuallinearmethodthatpeopleusetocalculatetheresidencetime,oneimportantparameterinthegasflowdynamics,needstoberectified.Thespatialprofileofpressuresimulatedexhibitsobviousspatialgradient.Thisishelpfulforexperimentaliststounderstandtheirgaspressuremeasurementsthatarealwaystakenatthechamberoutlet.Attheend,theworkspecificationandlimitationsarelisted.
出版日期
2018年12月22日（中国期刊网平台首次上网日期，不代表论文的发表时间）
