TheannealingbehaviorofAgnanoparticlesinsilicawithandwithoutdefectswasinvestigatedinthisstudy.SilicasampleswithandwithoutArionpre-irradiationwereimplantedwithAgionsandthenannealedattemperaturefrom300to850℃.UV-VISspectroscopyandTEMwereusedtocharacterizetheopticalabsorbancepropertyandsizedistributionofAgnanoparticles,respectively.OpticalabsorbanceresultsshowthattheabsorbanceintensityofSPR(SurfacePlasmonResonance,SPR)peakfromAgnanoparticlesinthesamplewithpre-irradiationisstrongerthaninthesamplewithoutpre-irradiation,whichindicatesthatthedefectsproducedbypre-irradiationpromptthenucleationofAgnanoparticles.Duringannealing,theSPRpeakshiftstoshortwavelengthdirection,asshowninFig.1.