COPOLYMERS OF CHLOROETHYL METHACRYLATE, GLYCIDYL METHACRYLATE, AND METHYL METHACRYLATE AS SYNCHROTRON RADIATION x-RAY PHOTORESISTS

(整期优先)网络出版时间:1998-04-14
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Thecopolymersofchloroethylmethacrylate(CMA),glycidylmethacry-late(GMA),andmethylmethacrylate(MMA)weresynthesizedinbenzenesolution.Theirbreadthsofthemolecularweightdistributionsare2.1and2.3,respectivelyThether-malstabilityofP(GMA-CMA)issuperiortothatofP(CMA-MMA).TheresolutionsofP(CMA-MMA)andP(GMA-CMA)photoresistswerefoundtobe0.1~0.16μmand0.17~0.2μm,respectively.