STM observation of pit formation and evolution during the epitaxial growth of Si on Si(001) surface

(整期优先)网络出版时间:2010-10-20
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PitformationandsurfacemorphologicalevolutioninSi(001)homoepitaxyareinvestigatedbyusingscanningtunnelingmicroscopy.Anti-phaseboundaryisfoundtogiverisetoinitialgenerationofpitsboundbybunchedDBsteps.Theterracesbreakupandarereducedtoacriticalnucleussizewithpitformation.Duetoanisotropickinetics,adownhillbiasdiffusioncurrent,whichislargeralongthedimerrowsthroughthecentreareaoftheterracethanthroughtheareaclosetotheedge,leadstotheprevalenceofpitsboundby{101}facets.Subsequentannealingresultsinashapetransitionfrom{101}-facetedpitstomulti-facetedpits.