Amethodbasedonthetheoryoftransfermatrixtodesigntheintegratedmicrolensforthecollimationofvertical-cavitysurfaceemittinglaser(VCSEL)arrayispresented.Theintegratedmicrolensesfabricatedonthesubstratedirectlyandonacertainpolymermaterialwhichisonthesubstrateareconsidered.Therelationshipsbetweentheradiusofcurvature,beamwaistandthepergenceangleaftercollimationareobtainedwiththehelpofZEMAX.Theresultsshowthatthedeviceswiththepergenceangleof15°(1/e2)andbeamwaistof2μmcanbeimprovedtothosewiththepergenceanglelowerthan1°,andthedeviceswithbeamwaistof10μmcanbeimprovedtothosewiththepergenceanglelowerthan3°,whichisagoodreferenceformanufacturinghigh-powerdeviceswithsmallpergenceangle.Theconclusionsincludingincreasingthethicknessesofboththesubstrateandpolymermaterialandreducingthediameterofoxidizedlayeraredrawn,whichwillbeanimportantguidanceforexperimentresearch.
